Cubic III-nitrides: potential photonic materials

Cubic III-nitrides: potential photonic materials
复制标题

立方III族氮化物:潜在的光子材料

DOI:
10.1117/12.865768
复制
发表时间:
2011
期刊:
--
影响因子:
--
通讯作者:
R. Katayama
R. Katayama
中科院分区:
--
文献类型:
--
作者:
K. Onabe;S. Sanorpim;H. Kato;M. Kakuda;T. Nakamura;K. Nakamura;S. Kuboya;R. Katayama

文献摘要

参考文献

相似文献

在合适的立方衬底上生长了c-GaN、c-GaN和c-AlGaN、c-InN和c-InGaN(富In)薄膜。这一系列的研究主要集中在α-相纯度上,这取决于相应的生长条件和所得的电学和光学性质。对于c-GaN和c-InN膜,尽管立方III族氮化物具有亚稳态性质,但仍获得了高于95%的α-相纯度。然而,对于c-AlGaN和c-InGaN膜,由于六方相通过立方{111}面上的堆垛层错而显著并入,因此α-相纯度迅速降低,立方{111}面可能暴露在粗糙化的生长或衬底表面上。结果表明,c-GaN和c-AlGaN薄膜中的电子迁移率与相纯度密切相关。
The growth and characterization of some cubic III-nitride films on suitable cubic substrates have been done, namely, c- GaN on GaAs by MOVPE, c-GaN and c-AlGaN on MgO by RF-MBE, and c-InN and c-InGaN (In-rich) on YSZ by RFMBE. This series of study has been much focused on the cubic-phase purity as dependent on the respective growth conditions and resulting electrical and optical properties. For c-GaN and c-InN films, a cubic-phase purity higher than 95% is attained in spite of the metastable nature of the cubic III-nitrides. However, for c-AlGaN and c-InGaN films, the cubic-phase purity is rapidly degraded with significant incorporation of the hexagonal phase through stacking faults on cubic {111} faces which may be exposed on the roughened growing or substrate surface. It has been shown that the electron mobilities in c-GaN and c-AlGaN films are much related to phase purity.
GaAs (001) 衬底上高光学质量 InGaPN 层的 MOVPE 生长
DOI: --
发表时间: 2009
期刊:
影响因子: --
作者:
D. Kaewket;S. Sanorpim;S. Tungasmita;R. Katayama;K. Onabe
通讯作者: K. Onabe