Growth and electrical properties of multidimensional tungsten nano-buliding blocks
Growth and electrical properties of multidimensional tungsten nano-buliding blocks
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DOI：
10.1063/1.1829156
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发表时间：
2004-12
影响因子：
4
通讯作者：
Yun‐Hi Lee;Donghwan Kim;C. Choi;Y. Jang;B. Ju
中科院分区：
文献类型：
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作者：
Yun‐Hi Lee;Donghwan Kim;C. Choi;Y. Jang;B. Ju
我们报告的演示钨纳米块，如纳米棒，纳米块，和nanocylinders通过一个简单的溅射W膜的热处理。各种类型的钨纳米结构的形成是基于残余薄膜应力的大小及其空间分布的差异，这取决于自催化W薄膜溅射沉积过程中的沉积压力。得到的形状显示出良好的控制结构，具有特征维度，如零维点，一维线，和二维纳米片与沉积压力。结果表明，通过一步热处理，利用每个薄膜的自催化功能，在原位多维achitectures的建设的可能性。
We report the demonstration of tungsten nanoblocks such as nanorods, nanoblocks, and nanocylinders through a simple thermal process of sputtered W films. The formation of various types of tungsten nanostructures was based on the difference in the magnitude of the residual film stress and in its spatial distribution, which depends on the deposition pressure during the sputter deposition of self-catalytic W thin film. The resulting shapes displayed well-controlled structures that have characteristic dimensionalities such as zero-dimensional dot, one-dimensional wire, and two-dimensional nanosheet with the deposition pressure. The results demonstrate the possibility of construction of in situ multidimensional achitectures through the one-step thermal process which uses a self-catalytic function of each thin film.