Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices
Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices
复制标题
DOI：
10.1016/s0925-4005(02)00468-9
复制
发表时间：
2003-04-01
影响因子：
8.4
通讯作者：
Mathies, RA
中科院分区：
文献类型：
--
作者：
Grover, WH;Skelley, AM;Mathies, RA
制造并表征了适合于大规模集成到玻璃微流体分析装置中的单片弹性体膜阀和隔膜泵。阀和泵是通过在蚀刻的玻璃流体通道和歧管晶片之间夹持弹性体膜来制造的。三层阀和泵设计的特点是简单的非热设备结合和混合玻璃-PDMS流体通道;四层结构包括玻璃流体系统，具有最小的流体-弹性体接触，以改善化学和生物化学相容性。气动阀具有
Monolithic elastomer membrane valves and diaphragm pumps suitable for large-scale integration into glass microfluidic analysis devices are fabricated and characterized. Valves and pumps are fabricated by sandwiching an elastomer membrane between etched glass fluidic channel and manifold wafers. A three-layer valve and pump design features simple non-thermal device bonding and a hybrid glass-PDMS fluidic channel; a four-layer structure includes a glass fluidic system with minimal fluid-elastomer contact for improved chemical and biochemical compatibility. The pneumatically actuated valves have