Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering
Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering
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DOI：
10.1016/j.sna.2010.01.007
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发表时间：
2011-01-01
影响因子：
4.6
通讯作者：
Shkel, Andrei M.
中科院分区：
文献类型：
--
作者：
Trusov, Alexander A.;Schofield, Adam R.;Shkel, Andrei M.
本文报道了一种新型双质量振动微机电系统（MEMS）z轴速率陀螺仪架构，该架构优先考虑传感模式品质因数，并改善了机械振动模式的排序。所提出的线性耦合、动态平衡的反相传感模式设计将衬底能量耗散降至最低，从而使品质因数最大化。杠杆驱动模式机制在结构上迫使对称解耦叉指进行反相驱动模式运动，消除了低频杂散模式，并对外部冲击和加速度提供了真正的机械抑制。在真空室中对绝缘体上硅（SOI）原型进行了表征，结果显示驱动模式品质因数为67000，超高传感模式品质因数为125000。引入了一种真空封装技术，并展示了一种陶瓷封装级密封陀螺仪，其品质因数约为100000。新设计的高品质因数和模式排序为在不影响对外部加速度敏感性的情况下实现超高标度因数提供了一条途径。（c）2010爱思唯尔有限公司。保留所有权利。
This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. SOI prototypes were characterized in a vacuum chamber demonstrating drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. A vacuum packaging technology was introduced and demonstrated a ceramic package-level sealed gyroscope with a quality factor on the order of 100,000. The high quality factor and mode ordering of the new design provide a path toward ultra-high scale factor without compromising the sensitivity to external accelerations. (c) 2010 Elsevier B.V. All rights reserved.