Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices
Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices
复制标题
使用纳米探测作为纳米级设备的诊断工具
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
L. Hsia
中科院分区：
文献类型：
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作者：
S. Toh;Z. Mai;P. K. Tan;E. Hendarto;H. Tan;Q.F. Wang;J.L. Cai;Q. Deng;T. H. Ng;Y. W. Goh;J. Lam;L. Hsia
纳米探测在纳米区域产生节点中的故障分析(FA)中起着至关重要的作用，因为它能够检测故障位置并表征故障器件的电气行为，从而更好地了解故障机制。它还为确定故障原因所需的物理分析提供了指南。这种在局部区域建立的电气故障分析(EFA)方法有助于加速FA。文中重点介绍了它在几个前端问题上的应用。
Nanoprobing plays a crucial role for failure analysis (FA) in the nanometer-region generation nodes by having the capability to detect the failure sites and characterize the electrical behaviour of malfunctional devices for better understanding of the failure mechanisms. It also offers a guide to the necessary physical analysis in identifying the cause of failure. This established electrical failure analysis (EFA) methodology at a localized area helps to accelerate the FA. Its application to few of the front-end issues is highlighted in the paper.