Electrochemical machining: new possibilities for micromachining
Electrochemical machining: new possibilities for micromachining
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DOI：
10.1016/s0736-5845(02)00019-4
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发表时间：
2002-06-01
影响因子：
10.4
通讯作者：
Boro, AK
中科院分区：
文献类型：
--
作者：
Bhattacharyya, B;Mitra, S;Boro, AK
电化学微加工（EMM）是一种广泛应用于电子和精密制造业，特别是微制造领域的加工工艺，因此迫切需要对高速阳极溶解过程有更好的了解。一个成功的尝试已经取得了发展的电解金属加工设置进行深入的独立的研究，实现满意的控制电化学加工工艺参数，以满足微加工的要求。已开发的EMM设置主要由各种子组件和系统组成，例如，机械加工单元，微工具系统，电力和控制系统和控制电解液流系统等所有这些系统组件集成在这样一种方式，开发的电解金属加工系统设置将能够执行电解金属加工领域的基础和基础研究，满足微加工目标的要求。(C)2002爱思唯尔科技有限公司版权所有。
A better understanding of high rate anodic dissolution processes is urgently required for electrochemical micromachining (EMM) to become a widely employed manufacturing process in the electronic and precision manufacturing industries particularly in the micromanufacturing domain. A successful attempt has been made to develop an EMM setup for carrying out in depth independent research for achieving satisfactory control of electrochemical machining process parameters to meet the micromachining requirements. The developed EMM setup mainly consists of various sub-components and systems, e.g., mechanical machining unit, microtooling system, electrical power and controlling system and controlled electrolyte flow system, etc. All these system components are integrated in such a way that the developed EMM system setup will be capable of performing basic and fundamental research in the area of EMM fulfilling the requirements of micromachining objectives. (C) 2002 Elsevier Science Ltd. All rights reserved.