A Control-Based Approach to Accurate Nanoindentation Quantification in Broadband Nanomechanical Measurement Using Scanning Probe Microscope
A Control-Based Approach to Accurate Nanoindentation Quantification in Broadband Nanomechanical Measurement Using Scanning Probe Microscope
复制标题
使用扫描探针显微镜在宽带纳米机械测量中进行精确纳米压痕量化的基于控制的方法
DOI：
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发表时间：
2014
影响因子：
2.4
通讯作者：
Q. Zou
中科院分区：
文献类型：
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作者：
Juan Ren;Q. Zou
本文提出了一种基于控制的方法来精确量化压痕在宽带纳米力学性能测量使用扫描探针显微镜（SPM）。精确的压痕测量对于基于探针的材料特性表征至关重要，因为施加的力和产生的压痕是该过程中测量的两个最重要的物理变量。然而，当测量频率范围变大时（即，宽带）。这样的错误的结果，从传统的方法无法占SPM z轴压电致动器的位移和垂直位移的悬臂在其固定端，和横向垂直耦合引起的悬臂运动时，测量频率范围增加的差异。一个基于控制的方法来解决这些限制的传统方法。通过实验证明了所提出的方法可以测量聚二甲基硅氧烷（PDMS）样品在宽频率范围内的粘弹性能。
This paper presents a control-based approach to accurately quantify the indentation in broadband nanomechanical property measurements using scanning probe microscope (SPM). Accurate indentation measurement is essential to probe-based material property characterization as the force exerted and the indentation generated are the two most important physical variables measured in the process. Large measurement errors, however, occur when the measurement frequency range becomes large (i.e., broadband). Such errors result from the inability of the conventional method to account for the difference between the SPM z-axis piezo actuator displacement and the vertical displacement of the cantilever at its fixed end, and the lateral-vertical coupling-caused cantilever motion when the measurement frequency range increases. A control-based approach is presented to address these limits of the conventional method. The proposed approach is demonstrated through experiments to measure the viscoelastic properties of a Polydimethylsiloxane (PDMS) sample over a broad-frequency range.