Development of a high energy resolution electron energy‐loss spectroscopy microscope
Development of a high energy resolution electron energy‐loss spectroscopy microscope
复制标题
高能量分辨率电子能量损失光谱显微镜的研制
作者：
Terauchi;Tanaka;Tsuno;Ishida
我们开发了一种高能量分辨率的电子能量损失谱（EELS）显微镜，它可以从指定的小样品区域和指定的小倒易空间区域获取光谱，以研究详细的电子结构。EELS显微镜配备了减速维恩过滤器作为单色器和分析器。滤波器被设计成实现像散聚焦。能量分辨率分别为12毫电子伏和25毫电子伏的情况下，没有和与标本。 空间和动量分辨率分别为直径30-110纳米和角直径1.1纳米-1。 EELS谱显示该仪器的性能。
We have developed a high energy resolution electron energy‐loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien filters as the monochromator and the analyser. The filters are designed to achieve a stigmatic focus. The energy resolutions are 12 meV and 25 meV for cases without and with a specimen, respectively. Spatial and momentum resolutions are 30–110 nm in diameter and 1.1 nm−1 in angular diameter, respectively. EELS spectra are presented to show the performance of this instrument.