Tribological performance of near equiatomic and Ti-rich NiTi shape memory alloy thin films
Tribological performance of near equiatomic and Ti-rich NiTi shape memory alloy thin films
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DOI：
10.1016/j.actamat.2015.04.006
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发表时间：
2015-06
期刊：
影响因子：
9.4
通讯作者：
W. Tillmann;S. Momeni
中科院分区：
文献类型：
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作者：
W. Tillmann;S. Momeni
采用磁控溅射法制备了近等原子、富钛的NiTi形状记忆合金薄膜，薄膜厚度为3 μm，工艺参数相同。采用x射线衍射仪（XRD）、场发射扫描电镜（FESEM）、差示扫描量热仪（DSC）、纳米压痕、球盘式、划痕试验和三维光学显微镜（3D）分析了沉积薄膜的微观结构、成分、形状记忆行为、力学和摩擦学性能。得到的结果清楚地表明，这两组薄膜的结晶演化和沉淀形成如何极大地影响其机械和摩擦性能。
Near equiatomic and Ti-rich NiTi shape memory alloy thin films were magnetron sputtered with the same processing parameters and thickness of 3 μm. The microstructure, composition, shape memory behavior, mechanical and tribological properties of the deposited thin films were analyzed by using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), differential scanning calorimetry (DSC), nanoindentation, ball-on-disc, scratch test, and three dimensional (3D) optical microscopy. The obtained results clearly show how the crystallization evolution and precipitation formation of these two sets of thin films can drastically influence their mechanical and tribological performances.