Decreasing surface outgassing by thin film getter coatings
Decreasing surface outgassing by thin film getter coatings
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DOI:
10.1016/s0042-207x(98)00017-7
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发表时间:
1998-05
期刊:
影响因子:
4
通讯作者:
C. Benvenuti;P. Chiggiato;F. Cicoira;V. Ruzinov
中科院分区:
文献类型:
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作者:
C. Benvenuti;P. Chiggiato;F. Cicoira;V. Ruzinov