Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses
Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses
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DOI：
10.1088/0960-1317/23/12/125018
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发表时间：
2013-11
影响因子：
2.3
通讯作者：
A. Malik;O. Fox;L. Alianelli;A. Korsunsky;R. Stevens;I. Loader;M. Wilson;I. Pape;K. Sawhney;P. May
中科院分区：
文献类型：
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作者：
A. Malik;O. Fox;L. Alianelli;A. Korsunsky;R. Stevens;I. Loader;M. Wilson;I. Pape;K. Sawhney;P. May
金刚石是用于X射线光学和仪器的非常理想的材料。然而，由于其极高的硬度和耐化学侵蚀性，金刚石很难形成适合X射线透镜的结构。折射透镜能够提供具有纳米级分辨率的X射线束。本文报道了一种制作金刚石透镜的模压工艺。采用光刻和深反应离子刻蚀技术制作了高质量的硅模具。研究的蚀刻工艺进行，以实现垂直侧壁和最小的表面粗糙度的硅模具进行了讨论。当试图存款金刚石到一个高的纵横比模具的化学气相沉积所经历的问题突出。使用这种传递模塑方法已经成功地制造了两代透镜，在第二次迭代中观察到的光学器件的质量和性能有显着改善。在钻石光源有限公司的同步加速器B16光束线上对钻石X射线光学器件进行的测试产生了亚微米宽度的线焦点。
Diamond is a highly desirable material for use in x-ray optics and instrumentation. However, due to its extreme hardness and resistance to chemical attack, diamond is difficult to form into a structure suitable for x-ray lenses. Refractive lenses are capable of delivering x-ray beams with nanoscale resolution. A moulding technique for the fabrication of diamond lenses is reported. High-quality silicon moulds were made using photolithography and deep reactive ion etching. The study of the etch process conducted to achieve silicon moulds with vertical sidewalls and minimal surface roughness is discussed. Issues experienced when attempting to deposit diamond into a high-aspect-ratio mould by chemical vapour deposition are highlighted. Two generations of lenses have been successfully fabricated using this transfer-moulding approach with significant improvement in the quality and performance of the optics observed in the second iteration. Testing of the diamond x-ray optics on the Diamond Light Source Ltd synchrotron B16 beamline has yielded a line focus of sub-micrometre width.