Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices
Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices
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DOI：
10.2478/nanofab-2014-0005
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发表时间：
2014-07
期刊：
影响因子：
2.9
通讯作者：
D. Cox;J. Gallop;L. Hao
中科院分区：
文献类型：
--
作者：
D. Cox;J. Gallop;L. Hao
聚焦离子束（FIB）作为一种制造工具，特别是在微米到纳米的长度尺度上，已经得到了稳定和日益增长的应用。传统上更常用于材料表征，FIB在越来越多的实验室中不断寻找新的研究领域。例如，在过去十年中，仅在英国，FIB仪器的数量就从主要由一家制造商提供的个位数，发展到由几家相互竞争的制造商提供的数十种仪器。虽然这是两个研究领域中较小的一个，但FIB制造已经发现自己在各种实验设备的修改和制造方面具有难以置信的强大功能。在这里，我们报告了我们在生产超导量子干涉器件（squid）和其他密切相关的计量应用器件中使用FIB。这是一个非常适合FIB制造的领域，因为所需的精度非常高，所需设备的数量相对较低，但使用FIB的灵活性意味着大范围的小批量，通常是独特的，设备可以在很短的交货时间内快速构建。
Abstract Focused ion beam (FIB) has found a steady and growing use as a tool for fabrication, particularly in the length-scale of micrometres down to nanometres. Traditionally more commonly used for materials characterisation, FIB is continually finding new research areas in a growing number of laboratories. For example, over the last ten years the number of FIB instruments in the U.K. alone has gone from single figures, largely supplied by a single manufacturer, to many tens of instruments supplied by several competing manufacturers. Although the smaller of the two research areas, FIB fabrication has found itself to be incredibly powerful in the modification and fabrication of devices for all kinds of experimentation. Here we report our use of FIB in the production of Superconducting QUantum Interference Devices (SQUIDs) and other closely related devices for metrological applications. This is an area ideally suited to FIB fabrication as the required precision is very high, the number of required devices is relatively low, but the flexibility of using FIB means that a large range of smallbatch, and often unique, devices can be constructed quickly and with very short lead times.