Ultrasonic microspectroscopy characterization of AlN single crystals
Ultrasonic microspectroscopy characterization of AlN single crystals
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DOI：
10.1143/apex.1.077004
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发表时间：
2008-07-01
影响因子：
2.3
通讯作者：
Winnacker, Albrecht
中科院分区：
文献类型：
--
作者：
Ohashi, Yuji;Arakawa, Mototaka;Winnacker, Albrecht
利用超声显微光谱（UMS）技术对物理气相传输法生长的AlN单晶Y切和Z切板的基本声学性能进行了研究。提出了一种通过测量纵波、横波和漏声表面波的声速来确定双试件声物理常数的方法。我们得到了准确的体波速度，LSAW速度及其在样品表面的分布，和密度与使用报道的常数计算相比，有很大的差异。我们还确定了相应的常数。该技术将有助于AlN晶体的进一步发展。(C)2008年日本应用物理学会。
Basic acoustic properties of AlN single crystal Y-cut and Z-cut plates, grown by the physical vapor transport method, were evaluated using ultrasonic microspectroscopy (UMS) technology. A method of determining the acoustical physical constants with two specimens was developed by measuring the velocities of longitudinal and shear waves and leaky surface acoustic waves (LSAWs). We obtained accurate bulk-wave velocities, LSAW velocities and their distributions in the specimen surfaces, and the density with great differences compared with the calculated ones using the reported constants. We also determined the corresponding constants. This UMS technology will contribute to the further development of AlN crystals. (C) 2008 The Japan Society of Applied Physics.