Fabrication of Localized Silicon-on-Insulator Based Rhombus-Shaped Channels in Silicon

Fabrication of Localized Silicon-on-Insulator Based Rhombus-Shaped Channels in Silicon
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硅中基于局部绝缘体上硅的菱形通道的制造

DOI:
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发表时间:
2019
期刊:
ECS Meeting Abstracts
影响因子:
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通讯作者:
Albin, Sacharia.
Albin, Sacharia.
中科院分区:
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文献类型:
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作者:
Ogini, Martins;Voyantzis, Mitchell;Koech, Philemon;Francis, Aneeta;Mohan, Susmitha;Deo, Makarand;Albin, Sacharia.

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