Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet
Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet
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DOI：
10.1088/0963-0252/19/4/045018
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发表时间：
2010-06
影响因子：
3.8
通讯作者：
J. Waskoenig;K. Niemi;N. Knake;L. Graham;S. Reuter;V. D. Gathen;T. Gans
中科院分区：
文献类型：
--
作者：
J. Waskoenig;K. Niemi;N. Knake;L. Graham;S. Reuter;V. D. Gathen;T. Gans
采用先进的光学诊断和动态等离子体化学的数值模拟研究了射频驱动的微气压等离子体射流中原子氧的形成。基态原子氧的绝对密度的激光光谱测量揭示了在等离子体核心和流出区域之间的界面处的陡峭梯度。空间分布解决内的核心等离子体的电极间间隙表明，体积过程占主导地位的表面反应。生产和销毁过程的细节进行了研究，在数值模拟基准相分辨光学发射光谱。主要的生产机制是电子诱导的，因此在等离子体边界鞘层附近最有效，在那里电子被激励。破坏是通过化学重粒子反应驱动的。由此产生的氧原子的空间分布是相对平坦的。通过数值模拟得到的原子氧密度的功率依赖性与激光光谱测量结果非常一致。
Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet is investigated using both advanced optical diagnostics and numerical simulations of the dynamic plasma chemistry. Laser spectroscopic measurements of absolute densities of ground state atomic oxygen reveal steep gradients at the interface between the plasma core and the effluent region. Spatial profiles resolving the interelectrode gap within the core plasma indicate that volume processes dominate over surface reactions. Details of the production and destruction processes are investigated in numerical simulations benchmarked by phase-resolved optical emission spectroscopy. The main production mechanisms are electron induced and hence most efficient in the vicinity of the plasma boundary sheath, where electrons are energized. The destruction is driven through chemical heavy particle reactions. The resulting spatial profile of atomic oxygen is relatively flat. The power dependence of the atomic oxygen density obtained by the numerical simulation is in very good agreement with the laser spectroscopic measurements.