EPMA and Quantitative MCs+-SIMS of Metal-DLC Coating Materials
EPMA and Quantitative MCs+-SIMS of Metal-DLC Coating Materials
复制标题
金属-DLC 涂层材料的 EPMA 和定量 MC -SIMS
作者：
P. Willich;Ulrike Wischmann
摘要：用（WDS）-EPMA和MCs+-西姆斯对金属-类金刚石（DLC）硬质涂层的成分进行了表征。 EPMA可实现精确（± 5%相对）定量分析，包括N、O和Ar的微量浓度（0.1-10 at%）。在“近表面”EPMA（E0 < 10 keV）条件下，表面氧化膜对“纯”金属标准的影响可能是精度方面的限制因素。足够“厚”的层状结构（膜厚≥ 2 μm）的深度剖析是通过沿着机械制备的斜面的EMA线扫描进行的。深度分辨率约为0.2 μm。MCs+-模式下的西姆斯可实现金属-DLC层状结构的高分辨率（< 20 nm）深度分析，包括H（1-20 at%）的测定。MCs+-西姆斯，即采用Cs+一次离子和监测MCs+分子二次离子（M是感兴趣的元素）被认为是一种有前途的途径，达到足够准确的（10-20%）SIMS定量。MC +-西姆斯的与基质无关的相对灵敏度因子源自EPMA定义的均匀涂层材料。EPMA被证明也是有用的，以检测有关的问题，在金属DLC材料中的Ar的西姆斯。结合EPMA-SIMS被证明是一种有效的分析策略，用于工业生产中的质量控制，并支持开发具有最佳摩擦学性能的金属DLC层状结构。
Abstract. Compositional characterization of metal-DLC (metal-containing diamond-like carbon) hard coatings is carried out by (WDS)-EPMA and MCs+-SIMS. EPMA enables accurate (± 5% relative) quantitative analysis including minor concentrations (0.1–10 at%) of N, O and Ar. Under conditions of “near-surface” EPMA (E0 < 10 keV) the influence of surface oxide films on “pure” metal standards may be a limiting factor in respect of accuracy. Depth profiling of sufficiently “thick” layered structures (film thickness ≥ 2 μm) is carried out by EPMA-line scans along mechanically prepared bevels. The depth resolution is about 0.2 μm. SIMS in the MCs+-mode enables high resolution (< 20 nm) depth profiling of metal-DLC layered structures including the determination of H (1–20 at%). MCs+-SIMS, i.e. employing Cs+ primary ions and monitoring MCs+ molecular secondary ions (M is the element of interest) is presented as a promising route towards sufficiently accurate (10–20%) SIMS-quantification. Matrix-independent relative sensitivity factors for MCs+-SIMS are derived from homogeneous coating materials defined by EPMA. EPMA proves to be also useful to detect problems related to SIMS of Ar in metal-DLC materials. The combination EPMA-SIMS is demonstrated as an effective analytical strategy for quality control in industrial production and to support the development of metal DLC layered structures with optimum tribological properties.