Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition
Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition
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通过聚焦离子束化学气相沉积在玻璃毛细管上制造纳米操纵器和执行器
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
S. Matsui
中科院分区：
文献类型：
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作者：
R. Kometani;T. Morita;K. Watanabe;T. Hoshino;K. Kondo;K. Kanda;Y. Haruyama;T. Kaito;J. Fujita;M. Ishida;Y. Ochiai;S. Matsui
玻璃毛细管上的三维纳米结构在各种微结构中有许多有用的应用，如操纵器、致动器和传感器。在30 keV Ga+聚焦离子束化学气相沉积法（FIB- cvd）制备的玻璃毛细管顶端，以菲蒸气为前驱体，观察到两个类金刚石碳柱在FIB辐照过程中能够作为操纵器。结果表明，这是由于两根柱子之间的电荷斥力引起的，这两根柱子在FIB照射下积累了电荷。利用该移动机构，利用FIB-CVD技术在玻璃毛细管尖端研制了三维纳米机械手和致动器。此外，通过对镀金玻璃毛细管施加电压，证明了三维纳米机械臂和致动器的原位运动观察。
Three-dimensional (3D) nanostructures on a glass capillary have a number of useful applications such as manipulators, actuators, and sensors in the various microstructures. We observed a phenomenon that two diamondlike-carbon pillars on a tip of glass capillary fabricated by 30 keV Ga+ focused-ion-beam-chemical vapor deposition (FIB-CVD) with a precursor of phenanthrene vapor was able to work as a manipulator during FIB irradiation. It became clear that it was caused by electronic charge repulsion between two pillars, which accumulated electric charge by FIB irradiation. By applying this moving mechanism, we have developed a 3D nanomanipulator and actuator on a tip of glass capillary by FIB-CVD. Furthermore, in situ observations of movement for a 3D nanomanipulator and actuator have been demonstrated by applying voltage onto a Au-coated glass capillary.