The evolution of interferometry from metrology to biomedical applications
The evolution of interferometry from metrology to biomedical applications
复制标题
干涉测量从计量学到生物医学应用的演变
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
J. Wyant
中科院分区：
文献类型：
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作者：
J. Wyant
干涉测量是一种强大的工具，通常用于测量表面，在光学制造，数据存储，机床和半导体等行业中有许多应用。多年来，干涉仪一直被安装在显微镜中，这样就可以测量表面的微观结构。相移干涉测量技术提供了一种极其准确、快速地将干涉图数据输入计算机的方法，并且数据采集过程中的固有噪声非常低，因此在良好的环境下可以进行埃或亚埃表面高度或厚度的测量。单镜头移相技术的最新发展使得在不太理想的环境中执行精确的相位测量技术成为可能，并且可以制作显示表面形状或光学厚度如何随时间变化的电影。这些相同的干涉测量技术可以应用于生物医学应用。本文将追溯这些干涉测量技术的发展历史，这些技术导致了这些技术在观察细胞和组织中的应用。
Interferometry is a powerful tool often used for the metrology of surfaces with many applications in industries such as optical fabrication, data storage, machine tool, and semiconductor. For many years interferometers have been built into microscopes so surface microstructure can be measured. Phase-shifting interferometric techniques have provided an extremely accurate rapid way of getting the interferogram data into the computer and the inherent noise in the data taking process is so low that in a good environment angstrom or sub-angstrom surface height or thickness measurements can be performed. The recent development of single-shot phase-shifting techniques has made it possible to perform accurate phase measurement techniques in less than ideal environments and to make movies showing how surface shape or optical thickness is varying with time. These same interferometric techniques can be applied to biomedical applications. This paper will trace the history of the development of these interferometric techniques that led to the application of these techniques to looking at cells and tissues.