Dynamic surface roughness profiler
Dynamic surface roughness profiler
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DOI：
10.1117/12.956503
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发表时间：
2011-09
期刊：
影响因子：
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通讯作者：
Brad Kimbrough;N. Brock;J. Millerd
中科院分区：
文献类型：
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作者：
Brad Kimbrough;N. Brock;J. Millerd
介绍了一种动态轮廓仪，该轮廓仪能够在存在显著振动或运动的情况下对表面粗糙度进行精确测量。利用一个特殊的ccd相机，包括一个微偏振器阵列和一个专有的发光二极管光源，获得了曝光时间为<；100μ秒的定量测量结果。基于偏振的干涉仪利用可调节的输入偏振态来优化条纹对比度和信噪比，用于测量反射率从1%到100%的光学表面。提出了一种新的相位计算算法，该算法几乎消除了因散粒噪声而导致的相位相关误差，限制了系统的性能。除了防震外，该系统重量轻、重量轻、外壳紧凑、24 x 24 x 8厘米、集成对准系统和多种安装选项，可直接安装在大型光学表面上，也可直接安装在抛光设备、支架、机架和机器人上。测量结果表明，在没有主动隔振的情况下，可实现均方根重复性<；0.005 nm和均方根精度&0.1 nm。
A dynamic profiler is presented that is capable of precision measurement of surface roughness in the presence of significant vibration or motion. Utilizing a special CCD camera incorporating a micro-polarizer array and a proprietary LED source, quantitative measurements were obtained with exposure times of <100 μsec. The polarization-based interferometer utilizes an adjustable input polarization state to optimize fringe contrast and signal to noise for measurement of optical surfaces ranging in reflectivity from 1 to 100%. A new phase calculation algorithm is presented that nearly eliminates phase-dependent errors resulting in shot noise limited performance. In addition to its vibration immunity, the system’s light weight, <5 kg, compact envelope, 24 x 24 x 8 cm, integrated alignment system, and multiple mounting options facilitate use both directly resting on large optical surfaces and directly mounted to polishing equipment, stands, gantries and robots. Measurement results presented show an RMS repeatability <0.005 nm and an RMS precision < 0.1nm which are achieved without active vibration isolation.