Patterning of polypyrrole using protein-based template and their potential application in resist
Patterning of polypyrrole using protein-based template and their potential application in resist
复制标题
使用基于蛋白质的模板进行聚吡咯图案化及其在抗蚀剂中的潜在应用
DOI：
10.1016/j.polymer.2020.123151
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发表时间：
2021
期刊：
影响因子：
4.6
通讯作者：
Huang Yingwei
中科院分区：
文献类型：
--
作者：
Wang Dong;Zhou Xing;Wang Chenxi;Fang Changqing;Zhang Wei;Huang Yingwei
聚吡咯(PPy)等微图案化导电聚合物因其具有高导电性、易合成、稳定性好等独特性能而受到人们的广泛关注。在这项工作中，精密控制的微图形构思成牛血清白蛋白(BSA)/聚吡咯(PPy)杂化薄膜作为模板或抗蚀剂用于光刻。杂化薄膜的制备方法简单，在适中的条件下组装而成，具有手感。根据分析，微图案化的BSA/PPy薄膜除了具有导电性外，还可以引入其他有价值的微加工特性，如光敏特性和附着力。这些图案可以在下面的Au/Cu/Si/PET衬底上实现。以牛血清白蛋白/聚吡咯薄膜为模板的光刻可以在8000μC/cm~2的辐照剂量下产生几何复杂的微图形。此外，对杂化材料在化学刻蚀系统中作为抗蚀剂的研究表明，杂化材料可以转移到硅衬底上，这在微细加工领域具有实际意义。BSA/PPy薄膜为聚吡咯的微细加工提供了一种新颖的绿色材料，促进了微器件的应用。
Micropatterned conducting polymer such as polypyrrole (PPy) have attracted growing interest due to their unique properties, such as high electrical conductivity, facile synthesis and well stability. In this work, precise control the micropattern is conceived into bovine serum albumin (BSA)/polypyrrole(PPy) hybrid film as a template or resist for photo lithography. The hybrid films are prepared by a facile and assembly in moderate conditions with handleability. According to the analyses, mircropatterned BSA/PPy film could introduce other valuable characteristics for micro-fabrication in addition to electrical conductivity, such as photosensitive features and adhesion. The patterns can be realized onto underlying Au/Cu/Si/PET substrates. Photo lithography on BSA/PPy film-based template could generate geometrically complex micropatterns at an irradiation dose of 8000 μC/cm2. Furthermore, the investigation for the hybrid as resist in chemical etching system suggests that the hybrid can be transferred on the silicon substrate, demonstrating the practical significance in the micro-fabrication field. The BSA/PPy film provides a novel and green material for the micro-fabrication of polypyrrole, promoting micro-device applications.