Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)
Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)
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DOI：
10.1039/b911888h
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发表时间：
2009-01-01
影响因子：
4.9
通讯作者：
Weimer, Alan W.
中科院分区：
文献类型：
--
作者：
Liang, Xinhua;Yu, Miao;Weimer, Alan W.
采用分子层沉积的方法，在致密铝烷氧化物杂化聚合物膜的颗粒表面沉积了厚度精确控制到几埃的多孔氧化铝膜。多孔结构可以在室温下通过温和的水蚀刻或在高温空气中煅烧来获得。
Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.