Thermal analysis of of oxide thin film transistor with fluorinated siliconnitride gate insulator
Thermal analysis of of oxide thin film transistor with fluorinated siliconnitride gate insulator
复制标题
氟化硅氮化硅栅绝缘体氧化物薄膜晶体管的热分析
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and Yukiharu Uraoka
中科院分区:
文献类型:
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作者:
Haruka Yamazaki;Yasuaki Ishikawa;Mami N. Fujii;Juan Paolo Bermundo;Eiji Takahashi;Yasuaki Andoh;and Yukiharu Uraoka