Self-heating technique of metallic substrate for reel-to-reel and double-sided deposition of YBa2Cu3O7−δ films
Self-heating technique of metallic substrate for reel-to-reel and double-sided deposition of YBa2Cu3O7−δ films
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DOI：
10.1007/s00339-015-9575-4
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发表时间：
2016-01
期刊：
影响因子：
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通讯作者：
Fei Zhang;R. Zhao;Yan Xue;Hui Wang;Yuanying He;Pan Zhang;B. Tao;J. Xiong;Yanrong Li
中科院分区：
文献类型：
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作者：
Fei Zhang;R. Zhao;Yan Xue;Hui Wang;Yuanying He;Pan Zhang;B. Tao;J. Xiong;Yanrong Li
提出了一种新型、简单、高效的金属带基材加热技术，并将其应用于卷对卷和双面薄膜沉积。在该技术中，将直流电流（IDC）传导到氧化物缓冲金属基板的金属层中以产生热量。通过将 IDC 从 22 A 改变到 25 A 来实现不同的基底表面温度。在这些温度下，通过金属有机化学气相沉积在离子束辅助沉积 (IBAD) 模板上制备了一系列 1 μm 厚、5 cm 长的 YBa2Cu3O7−δ(YBCO) 薄膜。对样品的X射线衍射分析表明，随着IDC的增加，YBCO薄膜的生长模式从混合轴和c轴转变为纯c轴。最佳的面外和面内纹理分别达到~1.4°和3.5°。还使用所提出的加热方法通过卷到卷沉积制备了 30 米长、500 纳米厚的单面 YBCO 涂层导体。所制造的导体呈现均匀的结晶和织构，并在自场和 77 K (Jc77K, 0T) 下表现出 2.8–3.2 MA/cm2 的临界电流密度。此外，在双面IBAD模板的两面同时制备了500 nm厚的YBCO薄膜。薄膜的两侧均表现出均匀的纹理和Jc77K，0T为3.2 MA/cm2。结果表明，所提出的基板加热技术可用于 YBCO 涂层导体的卷对卷和双面沉积。
A new, simple, and highly efficient heating technology for metal tape substrates is proposed and applied to reel-to-reel and double-sided film deposition. In this technology, direct electrical current (IDC) is conducted into the metal layer of oxide-buffered metal substrate to induce heat. Different substrate surface temperatures were achieved by varyingIDCfrom 22 to 25 A. At these temperatures, a series of 1-μm-thick and 5-cm-long YBa2Cu3O7−δ(YBCO) films were fabricated on ion-beam-assisted deposition (IBAD) templates through metal organic chemical vapor deposition. X-ray diffraction analysis on the samples revealed that the YBCO film changed its growth mode from mixeda-axis andc-axis to purelyc-axis with increasingIDC. The optimal out-of-plane and in-plane texture reached ~1.4° and 3.5°, respectively. A 30-m-long and 500-nm-thick single-sided YBCO-coated conductor was also prepared through reel-to-reel deposition using the proposed heating method. The fabricated conductor presented homogeneous crystallization and texture and exhibited a critical current density at self-field and 77 K (Jc77K, 0T) of 2.8–3.2 MA/cm2. Moreover, 500-nm-thick YBCO films were fabricated simultaneously on both sides of the double-sided IBAD template. The two sides of films demonstrated uniform texture andJc77K, 0Tof 3.2 MA/cm2. Results demonstrated that the proposed substrate heating technology can be used for reel-to-reel and double-sided deposition of YBCO-coated conductors.