Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces
Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces
复制标题
微悬臂梁触觉传感器柔性阵列的制造以及法向力和剪切力分布的测量
DOI：
10.1143/jjap.50.06gm02
复制
发表时间：
2011
影响因子：
1.5
通讯作者：
H. Noma
中科院分区：
文献类型：
--
作者：
Daiki Hirashima;Tatsuya Uematsu;M. Sohgawa;W. Mito;T. Kanashima;M. Okuyama;H. Noma
采用微机电系统（MEMS）技术，在弹性体中嵌入三个微悬臂梁构成触觉传感器系统。这些传感器小尺寸（3 ×4 mm2）芯片安装在柔性板上，因此即使在曲面上也可以设置所制造的传感器阵列。此外，当两种物体（丙烯酸半球和黄铜圆柱）与所制造的传感器横向移动接触时，得到了法向力和剪切力的空间分布。分布结果适当地反映了物体的表面形状，并给出了力矢量的行为。
A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 ×4 mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector.