Morphological transformation of a crystal–melt interface during unidirectional growth of silicon

Morphological transformation of a crystal–melt interface during unidirectional growth of silicon
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DOI:
10.1016/j.actamat.2011.04.016
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发表时间:
2011-06
期刊:
影响因子:
9.4
通讯作者:
K. Fujiwara;Raira Gotoh;Xinbo Yang;H. Koizumi;J. Nozawa;S. Uda
K. Fujiwara;Raira Gotoh;Xinbo Yang;H. Koizumi;J. Nozawa;S. Uda
中科院分区:
材料科学1区
文献类型:
--
作者:
K. Fujiwara;Raira Gotoh;Xinbo Yang;H. Koizumi;J. Nozawa;S. Uda

文献摘要

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通过原位观察研究了单向生长过程中Si(110)、(112)和(111)晶液界面的形态转变。直接观察到,在高生长速度下,Si(110)和(112)晶体-熔体界面的形态从平面小平面转变为锯齿形小平面,尽管在Si(111)界面处没有观察到这种形态转变。结果表明,当在平面界面上引入波动扰动时,会形成锯齿形的刻面界面,并且扰动被放大。Si(110)和(112)界面的这种锯齿形刻面形成行为与Si(100)界面的类似。它的结论是,这种锯齿形刻面界面的形成是普遍的,在晶体-熔体界面的粗糙平面的Si,和晶体-熔体界面处的负温度梯度所需的形态从平面到锯齿形刻面的转变。
We investigated the morphological transformation at Si (1 1 0), (1 1 2) and (1 1 1) crystal–melt interfaces during unidirectional growth by in situ observation. It was directly observed that the morphology of the Si (1 1 0) and (1 1 2) crystal–melt interfaces was transformed from planar to zigzag facets at high growth velocities, although no such morphological transformation was observed at Si (1 1 1) interfaces. It was shown that a zigzag faceted interface was formed when a wavy perturbation was introduced into the planar interface, and that the perturbation was amplified. This zigzag facet formation behavior of the Si (1 1 0) and (1 1 2) interfaces is similar to that of the Si (1 0 0) interface. It is concluded that this formation of a zigzag faceted interface is universal at the crystal–melt interface of rough planes of Si, and that a negative temperature gradient at the crystal–melt interface is required for morphological transformation from planar to zigzag facets.