Analysis of CH_4 rf plasmas for carbon naotube growth : Comparison between computer modeling and experimental results
Analysis of CH_4 rf plasmas for carbon naotube growth : Comparison between computer modeling and experimental results
复制标题
碳纳米管生长的 CH_4 射频等离子体分析:计算机建模与实验结果的比较
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
J.Nakamura
中科院分区:
文献类型:
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作者:
A.Okita;Y.Suda;A.Ozeki;H.Sugawara;Y.Sakai;A.Oda;J.Nakamura