Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN
Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN
复制标题
使用 MoN 制造超导纳米线单光子探测器
DOI：
10.1109/tasc.2022.3144967
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发表时间：
2022
影响因子：
1.8
通讯作者：
Shibata H.
中科院分区：
文献类型：
--
作者：
Nishikawa M.;Sawai K.;Sakai K.;Kirigane N.;Ohnishi K.;Nakano W.;Matsuo Y.;Shibata H.
报道了基于氮化钼（MoN）薄膜的超导纳米线单光子探测器（SNSPD，SSPD）的制备。用直流反应磁控溅射法制备了超薄多晶γ-Mo 2N薄膜，其室温温度约为6 K。利用椭圆偏振法测量得到的氮化钼的光学常数，采用时域有限差分法（FDTD）计算了器件的吸收效率。SNSPD的曲折的150 nm的宽度和7 nm厚的纳米线显示了一个长的饱和平台的偏置电流依赖的系统检测效率（λ）在可见光波长。在1560 nm波长处，采用腔结构的SNSPD的偏振度为37%，定时抖动为79 ps。结果表明，MoN是一个有前途的替代非晶超导体的高性能SNSPD。
We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo2N films with aTcabout 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD.