Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook
Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook
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DOI：
10.1016/j.nima.2009.11.013
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发表时间：
2010-05-01
影响因子：
1.4
通讯作者：
Schindler, A.
中科院分区：
文献类型：
--
作者：
Arnold, T.;Boehm, G.;Schindler, A.
非球面反射光学系统在同步辐射光源和X射线应用中越来越重要。这种高精度光学表面的制造需要确定性的超精密加工技术，本文着重介绍了莱布尼茨表面改性研究所（IOM）离子束光整加工技术和大气等离子体射流技术的发展现状。离子束和等离子体射流加工技术的基础知识以及为生产目的开发或正在开发的相应设备和组件将分别与离子束成形（IBF），离子束平滑（IBS）和使用大气等离子体射流加工（PJM）技术的深度成形和形状校正的结果一起介绍。使用IBF和IBS，我们几乎在各种材料的空间表面波长的整个光谱上实现了纳米和亚纳米的精度。PJM技术已经发展到获得高去除率，特别是在硅基材料上。本文对今后发展先进X射线光学技术的活动作了展望。(C)2009 Elsevier B.V.保留所有权利。
Aspheric reflective optics are becoming more and more important for synchrotron radiation source and X-ray applications. The manufacture of such highly precise optical surfaces requires deterministic ultra-precision machining technologies.The article focuses on the present status of development of ion beam finishing technology and of atmospheric plasma jet technology in Leibniz Institute of Surface Modification (IOM). The basics of the ion beam and the plasma jet processing technologies and the respective equipment and components developed or being under development for production purposes will be presented together with results on the ion beam figuring (IBF), ion beam smoothing (IBS), and the deep figuring and figure correction using atmospheric plasma jet machining (PJM) technique, respectively. Using IBF and IBS, we achieve nanometer and sub-nanometer accuracies over nearly the entire spectrum of spatial surface wavelength on a variety of materials. PJM technique has been developed to obtain high removal rates especially on silicon-based materials. Removal depths of some 10 mu m can easily be achieved.The article gives an outlook to future activities on developments of the techniques with respect to advanced X-ray optics. (C) 2009 Elsevier B.V. All rights reserved.