Synthesis and characterization of metal-filled carbon nanotubes by microwave plasma chemical vapor deposition

Synthesis and characterization of metal-filled carbon nanotubes by microwave plasma chemical vapor deposition
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DOI:
10.1016/j.diamond.2004.12.008
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发表时间:
2005-03-01
影响因子:
4.1
通讯作者:
Kaneko, K
Kaneko, K
中科院分区:
材料科学2区
文献类型:
--
作者:
Hayashi, Y;Tokunaga, T;Kaneko, K

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制备了一种新型的钯基金属填充碳纳米管(MF-CNTs),并对其特性进行了研究。采用微波等离子体增强化学气相沉积法,使用CH 4和H-2气体,采用偏压增强生长法,在Pd/SiO2/Si衬底和Pd/Mo网片上生长了MF-CNTs。采用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、X射线能谱(EDS)和拉曼光谱(Raman)对Pd基MF-CNTs的结构和组成进行了研究。TEM和EDS分析表明,MF-CNTs由厚的圆柱形石墨壁组成,并在其根部填充有Pd金属。基于TEM表征,我们提出了一个富有成效的描述封装机制。(c)2005 Elsevier B. V.保留所有权利。
A new type of palladium-based metal-filled carbon nanotubes (MF-CNTs) was fabricated and their characteristics were investigated. The MF-CNTs were grown on Pd/SiO2/Si substrates and Pd/Mo mesh by a microwave plasma-enhanced chemical vapor deposition method using CH4 and H-2 gasses with the technique of bias-enhanced growth method. The structure and composition of Pd-based MF-CNTs were thoroughly investigated by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (EDS), and Raman spectroscopy. TEM and EDS analyses showed that MF-CNTs were composed of thick cylindrical graphite walls, and filled with Pd metal inside their roots. Based on TEM characterizations, we proposed a fruitful description for the encapsulating mechanisms. (c) 2005 Elsevier B.V. All rights reserved.