Measurement of reaction current during atomic force microscope local oxidation of conductive surfaces capped with insulating layers

Measurement of reaction current during atomic force microscope local oxidation of conductive surfaces capped with insulating layers
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原子力显微镜对覆盖绝缘层的导电表面局部氧化反应电流的测量

DOI:
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发表时间:
2008
期刊:
Jpn. J. Appl. Phys. 47
影响因子:
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通讯作者:
T. Yamada an J. Shirakashi
T. Yamada an J. Shirakashi
中科院分区:
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文献类型:
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作者:
Y. Shimada;T. Yamada an J. Shirakashi

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