The formation of surfaces by diffusion limited annihilation
The formation of surfaces by diffusion limited annihilation
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通过扩散有限湮灭形成表面
DOI：
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发表时间：
1986
期刊：
影响因子：
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通讯作者：
J. Deutch
中科院分区：
文献类型：
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作者：
P. Meakin;J. Deutch
计算机模拟已经在二维和三维空间中进行，以探索由移动粒子对最初光滑表面的扩散有限湮灭形成的表面。从对宽度为l晶格单元的二维条带进行的模拟中，我们发现表面高度（ξ）的渐近方差随l的变化符合ξ ~ [ln(l)]1/2。对于尺寸为l×l晶格单元的方形截面的三维系统，我们发现ξ很快达到一个与l（ξ ~ l°）无关的极限值。对其他几何形状也进行了各种二维模拟。这些模拟结果表明，扩散限制湮灭过程不能用于通过惰性掩膜蚀刻产生清晰的凹槽。
Computer simulations have been carried out in two and three dimensions to explore the formation of surfaces by diffusion limited annihilation of an initially smooth surface by mobile particles. From simulations carried out on two‐dimensional strips of width l lattice units we find that the asymptotic variance in the surface height (ξ) scales with l according to ξ∼[ln(l)]1/2. For three‐dimensional systems with a square cross section of size l×l lattice units we find that ξ quickly reaches a limiting value which is essentially independent of l(ξ∼l°). A variety of two‐dimensional simulations were also carried out for other geometries. The results of these simulations indicate that diffusion limited annihilation processes cannot be used to produce sharply defined grooves by etching through an inert mask.