Replicable one-dimensional non-polarizing guided mode resonance gratings under normal incidence
Replicable one-dimensional non-polarizing guided mode resonance gratings under normal incidence
复制标题
法向入射下可复制的一维非偏振导模共振光栅
DOI：
10.1364/oe.20.016974
复制
发表时间：
2012-07-16
期刊：
影响因子：
3.8
通讯作者：
Turunen, Jari
中科院分区：
文献类型：
--
作者：
Saleem, Muhammad Rizwan;Zheng, Dandan;Turunen, Jari
偏振不敏感导模谐振 (GMR) 滤波器在光通信系统等应用中发挥着重要作用。在这里，我们报告了两种结构简单的一维（1D）GMR 光栅的设计和制造，它们在法线入射下具有非偏振谐振特性。采用电子束光刻和反应离子刻蚀技术制备了单层矩形轮廓TiO2光栅，首次在实验中证明了一维光栅在法向入射下近乎完美的非偏振滤光效果。然后，通过纳米压印和原子层沉积制备了TiO2涂层的聚碳酸酯一维GMR光栅，该光栅还表现出良好的非偏振性能和低成本大规模复制此类功能器件的潜力。
Polarization-insensitive guided-mode resonance (GMR) filters have significant role in applications such as optical communication systems. Here, we report the design and fabrication of two types of simple-structured one-dimensional (1D) GMR gratings with non-polarizing resonance properties under normal incidence. A single-layer rectangular-profile TiO2 grating is fabricated by electron beam lithography and reactive ion etching, which demonstrates, for the first time in experiment, almost perfect non-polarizing filtering effect with 1D grating under normal incidence. Then, a TiO2-coated polycarbonate 1D GMR grating is fabricated by nanoimprinting and atomic layer deposition, which also exhibits good non-polarizing property and the potential of low-cost mass replication of such functional devices.