AlN thin film transducers for high temperature non-destructive testing applications
AlN thin film transducers for high temperature non-destructive testing applications
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DOI：
10.1063/1.3700345
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发表时间：
2012-04-01
影响因子：
3.2
通讯作者：
Fu, Yong Qing
中科院分区：
文献类型：
--
作者：
Hou, Ruozhou;Hutson, David;Fu, Yong Qing
AlN 薄膜超声波换能器正在开发用于高温环境下检测和监控的无损检测 (NDT) 应用。超声波换能器是通过在铝合金和碳钢基底上射频溅射沉积 c 轴取向 AlN 薄膜来制造的。使用高温下的脉冲回波实验研究了换能器的高温性能和耐用性，并表征了换能器的故障模式。结果表明，溅射的 AlN 薄膜在高达 600 摄氏度的高温下仍保持稳定的晶体结构和取向。然而，超声换能器的高温性能受到基底性能恶化的限制。发现铝合金薄膜的高温极限是基材的熔化温度。沉积在碳钢基底上的 AlN 薄膜可在高达 500 摄氏度的温度下工作，但如果温度进一步升高，碳钢表面的快速氧化会导致传感器失效。 (C) 2012 年美国物理研究所。 [http://dx.doi.org/10.1063/1.3700345]
AlN thin film ultrasonic transducers are being developed for non-destructive testing (NDT) applications in detection and monitoring in a high temperature environment. The ultrasonic transducers were fabricated by RF sputter deposition of c-axis oriented AlN films on aluminum alloy and carbon steel substrates. High temperature performance and durability of the transducers were investigated using pulse-echo experiments at elevated temperatures, and the transducer failure mode was characterized. Results showed that the sputtered AlN films maintained a stable crystalline structure and orientation at elevated temperatures up to 600 degrees C. The high temperature performance of the ultrasonic transducers, however, was limited by the deterioration of substrate properties. The high temperature limit for the films on aluminum alloy was found to be the melting temperature of the substrate. The AlN films deposited on the carbon steel substrate operated up to 500 degrees C, but if the temperature was increased further, rapid surface oxidation of the carbon steel caused the transducer to fail. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3700345]