Hydrogen outgasing from titanium-modified layers with various surface treatments
Hydrogen outgasing from titanium-modified layers with various surface treatments
复制标题
经过各种表面处理的钛改性层的氢气脱气
DOI：
10.1116/1.1392396
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
T. Homma
中科院分区：
文献类型：
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作者：
Y. Mizuno;A. Tanaka;K. Takahiro;T. Takano;Y. Yamauchi;T. Okada;S. Yamaguchi;T. Homma
在极高真空（XHV）系统中，氢除气是获得低于1.0×10−10 Pa真空压力的最重要因素。 钛是用于XHV结构的有趣材料。这项工作将证明真空技术中纯钛的氢除气和表面结构之间的明确相关性。钛表面的处理，如化学，电，抛光，机械化学抛光。氧化物层的表征已经进行了使用俄歇电子能谱和角分辨X射线光电子能谱，并已通过使用光学显微镜观察到的改性层的横截面。通过弹性反冲探测分析测量了表面区域中的氢分布。氧化物厚度为20至50 nm，尽管完成的钛表面覆盖有TiO 2用于化学抛光、电抛光、抛光抛光（BP）和机械化学抛光（MCP）;此外，TiO 2用于化学抛光、电抛光和机械化学抛光。
In an extremely high-vacuum (XHV) system, hydrogen outgassing is the most important factor to obtain vacuum pressure below 1.0×10−10 Pa. Titanium is an interesting material for applications in XHV construction. This work will demonstrate a clear correlation between hydrogen outgassing and surface structures of pure titanium in vacuum technology. The titanium surfaces were prepared following treatments such as chemical, electrical, buffing, and mechanochemical polishing. Characterization of oxide layers has been carried out using Auger electron spectroscopy and angle-resolved x-ray photoelectron spectroscopy, and a cross section of the modified layer has been observed by using an optical microscope. The hydrogen distribution in a surface region was measured by elastic recoil detection analysis. The oxide thicknesses were from 20 to 50 nm, although the finished titanium surfaces were covered with TiO2 for chemical polish, electrical polish, buffing polish (BP), and mechanochemical polish (MCP); also, TiO wa...