Soft X-ray spectroscopy from image sequences with sub-100 nm spatial resolution

Soft X-ray spectroscopy from image sequences with sub-100 nm spatial resolution
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DOI:
10.1046/j.1365-2818.2000.00640.x
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发表时间:
2000-02-01
期刊:
JOURNAL OF MICROSCOPY-OXFORD
影响因子:
--
通讯作者:
Zimba, C
Zimba, C
中科院分区:
其他
文献类型:
--
作者:
Jacobsen, C;Wirick, S;Zimba, C

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描述了一种方法,其中使用扫描透射X射线显微镜获取并对准在紧密间隔的光子能量下的X射线图像序列。近边吸收光谱,然后可以从两个大的,不规则的区域,并从区域小的空间分辨率的显微镜(约40纳米的例子中显示在这里),该技术的使用说明在检查的层状聚合物膜,微陨石部分,和行星际尘埃颗粒部分。
A method is described whereby a sequence of X-ray images at closely spaced photon energies is acquired using a Scanning transmission X-ray microscope, and aligned. Near-edge absorption spectra can then be obtained both from large, irregular regions, and from regions as small as the spatial resolution of the microscope (about 40 nm in the examples shown here), The use of the technique is illustrated in examination of a layered polymer film, a micrometeorite section, and an interplanetary dust particle section.