Modulation of optical transmittance and conductivity by the period, linewidth and height of Au square mesh electrodes
Modulation of optical transmittance and conductivity by the period, linewidth and height of Au square mesh electrodes
复制标题
通过金方网电极的周期、线宽和高度调制光学透射率和电导率
DOI：
10.1364/oe.23.000a62
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发表时间：
2015-02-09
期刊：
影响因子：
3.8
通讯作者：
Du, Zuliang
中科院分区：
文献类型：
--
作者：
Yang, Guanghong;Liu, Bing;Du, Zuliang
具有表面等离子体激元的金属透明导电电极（TCE）在太阳能电池的光吸收增强和发光二极管的光提取等方面得到了广泛的研究，但其透明导电性能和表面等离子体激元受其微观形貌和微观结构的控制。本文采用时域有限差分模拟方法，详细研究了方形网格电极中Au纳米线的光电耦合效应和周期、线宽和高度的光透射调制，并利用电子束光刻技术制备了周期为500 nm、高度为70 nm、线宽为60 ~ 100 nm的方形网格Au纳米线TCE。测试结果表明，TCE在350-700 nm波长范围内的光学透过率约为70%，在700-1000 nm波长范围内的光学透过率超过80%，与理论模拟结果雅阁。光学透过率受反射损耗、局域表面等离子体共振和表面等离子体极化吸收损耗的影响，与几何参数有关。当线宽从60 nm增加到100 nm时，SPPs的峰位从844 nm蓝移到812 nm，峰宽随线宽的增加而增加。测得周期为500 nm，高度为50 nm，线宽为50 nm的TCE的表面电阻率约为74.5 Ω/m（2），约为商用氧化铟锡玻璃的2倍。(C)2015美国光学学会
Metal transparent conductive electrode (TCE) with surface plasmons has been extensively studied for light absorption enhancement in solar cells and light extraction in Light-Emitting Diodes etc. But its transparent conductive properties and surface plasmons are controlled by its micromorphologies and microstructures. In this work, photoelectric coupling effects and optical transmittance modulations of period, linewidth and height of Au nanowire in square mesh electrode were investigated detailedly using a comprehensive finite-difference time domain calculation stimulation, and then Au square mesh TCEs with the 500 nm in period, 70 nm in height and linewidth ranging from 60 to 100 nm were fabricated using electron beam lithography. The measured results showed that the optical transmittance of the TCEs is about 70% in the 350-700 nm wavelength range and over 80% in the 700-1000 nm range, which accord with the theoretical simulation results. Optical transmittance is affected by reflection loss, localized surface plasmon resonances and surface plasmon polarizations (SPPs) absorption loss, concerned about geometry parameters. SPPs dip peak position exhibits a blue-shift from 844 to 812 nm and the width of peak increases with increasing the linewidth from 60 to 100 nm, The measured surface resistivity of the TCEs with the 500 nm in period, 50 nm in height and 50 nm in linewidth is about 74.5 Omega/m(2), about two times bigger than that of commercial indium tin oxide glass. (C) 2015 Optical Society of America