Field emission current cleaning and annealing of microfabricated cold cathodes

Field emission current cleaning and annealing of microfabricated cold cathodes
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微加工冷阴极的场发射电流清洗和退火

DOI:
10.1116/1.1349206
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发表时间:
2001
影响因子:
1.4
通讯作者:
J. Panitz
J. Panitz
中科院分区:
工程技术4区
文献类型:
--
作者:
P. Schwoebel;C. Spindt;C. Holland;J. Panitz

文献摘要

被引文献

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通过提取的场发射电流的热清洗和退火已被用于实现和保持微制造冷场发射阴极的稳定的发射特性。我们的研究表明,阴极尖端表面可以平滑,重结晶,并至少部分地清除表面吸附物。结果是发射电流噪声的显著降低和表面污染后阴极的初始电流-电压特性的恢复。
Thermal cleaning and annealing by the extracted field emission current has been used to achieve and maintain stable emission characteristics with microfabricated cold field emission cathodes. Our studies show that the cathode tip surface can be smoothed, recrystallized, and at least partially cleaned of surface adsorbates. The result is a significant decrease in emission current noise and recovery of the initial current–voltage characteristics of the cathode following surface contamination.