Recent advances in microcavity plasma devices and arrays: a versatile photonic platform
Recent advances in microcavity plasma devices and arrays: a versatile photonic platform
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微腔等离子体器件和阵列的最新进展：多功能光子平台
DOI：
10.1088/0022-3727/38/11/002
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
K. Chen
中科院分区：
文献类型：
--
作者：
J. G. Eden;S. Park;N. Ostrom;K. Chen
回顾了最近微等离子体器件发展中的一些亮点，重点介绍了硅基混合等离子体/半导体像素的大阵列。现已实现40 000(2 0 0×2 0 0) 像素阵列，激励频率为5~2 0 kHz的正弦交流波形。简要描述了这些阵列的制作及其在稀有气体和Ar/N_2混合气体中的电学和光学性能。文中还讨论了具有压电介质(BaTiO_3)、直径50 的圆柱形微腔和总厚度为∼110 µm的金属/介质/金属器件。最后，在微放电装置中引入多壁碳纳米管作为辅助电流源，作为将纳米技术集成到微腔等离子体结构中所提供的机会的典范。
Selected highlights in the recent development of microplasma devices are reviewed with emphasis on large arrays of Si-based hybrid plasma/semiconductor pixels. Arrays of 40 000 (200 × 200) pixels, excited by sinusoidal ac waveforms at frequencies of 5–20 kHz, have now been realized. The fabrication of these arrays and their electrical and optical performance with rare gases and Ar/N2 mixtures are briefly described. Metal/dielectric/metal devices having a piezoelectric dielectric (BaTiO3), a cylindrical microcavity 50 µm in diameter, and a total thickness of ∼ 110 µm are also discussed. Finally, the introduction of multiwall carbon nanotubes into microdischarge devices as an auxiliary source of current is presented as being exemplary of the opportunities afforded by the integration of nanotechnology into microcavity plasma structures.