A finite element model to predict the ablation depth in pulsed laser ablation

A finite element model to predict the ablation depth in pulsed laser ablation
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DOI:
10.1016/j.tsf.2010.09.016
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发表时间:
2010-12-01
期刊:
影响因子:
2.1
通讯作者:
Joshi, Suhas S.
Joshi, Suhas S.
中科院分区:
材料科学3区
文献类型:
--
作者:
Vasantgadkar, Nikhil A.;Bhandarkar, Upendra V.;Joshi, Suhas S.

文献摘要

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本文提出了一个二维有限元模型来预测激光烧蚀过程中的温度分布和烧蚀深度。该模型考虑了一些方面的过程中,迄今已被认为是独立的文献。考虑的方面包括:靶材料的温度相关的材料性质、等离子体屏蔽对入射激光通量的影响、以及靶的温度相关的吸收率和吸收系数。很明显,这些考虑因素导致模型预测消融深度的能力显著提高。最后,预测的烧蚀深度被发现在较低的激光能量密度与实验结果非常匹配,虽然在较高的能量密度有一个边际高估。(C)2010 Elsevier B.V.保留所有权利。
This work presents development of a two-dimensional finite element model to predict temperature distribution and ablation depth in a laser ablation process. The model considers a number of aspects of the process, which hitherto have been considered independently in the literature. The aspects considered include: temperature dependent material properties of the target material, effect of plasma shielding on the incident laser flux, and temperature dependent absorptivity and absorption coefficient of the target. It was evident that these considerations have resulted in a significant improvement in the ability of the model to predict the ablation depth. Finally, the predicted ablation depth was found to match extremely well with experimental results at lower laser fluences, though at higher fluences there is a marginal overestimation. (C) 2010 Elsevier B.V. All rights reserved.