Hiroki Takahashi: "Mechanisms of reduction of the internal stress in hydrogenated silicon oxide films prepared by Ar/H_2 sputtering" Thin Solid Films. 281-282. 348- (1996)

Hiroki Takahashi: "Mechanisms of reduction of the internal stress in hydrogenated silicon oxide films prepared by Ar/H_2 sputtering" Thin Solid Films. 281-282. 348- (1996)
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Hiroki Takahashi:“Ar/H_2 溅射制备的氢化硅氧化物薄膜中内应力的降低机制”固体薄膜。

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