Two-Dimensional Ceramic Photonic Crystals Fabricated by a Solution Method
Two-Dimensional Ceramic Photonic Crystals Fabricated by a Solution Method
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溶液法制备二维陶瓷光子晶体
DOI：
10.1143/jjap.42.6721
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发表时间：
2003
影响因子：
1.5
通讯作者：
M. Kuwabara
中科院分区：
文献类型：
--
作者：
Shumpei Shimada;Shingo Hirano;M. Kuwabara
我们制作了二维六角阵列的纳米级陶瓷柱的二氧化钛或钛酸钡。通过将溶胶溶液引入具有气孔的电子束抗蚀剂模具中，随后在模具上干法蚀刻不必要的前体层，制备前体阵列。通过在773-1073 K下烧成前驱体阵列，制备了由半径为55-85 nm、高度为500-550 nm的致密二氧化钛或钛酸钡陶瓷柱组成的陶瓷阵列。陶瓷阵列在可见光区的反射峰几乎与平面波方法计算的能带结构相对应。
We fabricated two-dimensional hexagonal arrays of nanoscale ceramic pillars of titania or barium titanate. Precursor arrays were prepared by introducing sol solutions into electron-beam resist molds with air holes and subsequently dry etching unnecessary precursor layers on the molds. Ceramic arrays, consisting of dense titania or barium titanate ceramic pillars with a radius of 55–85 nm and a height of 500–550 nm, were fabricated by firing the precursor arrays at 773–1073 K. The reflection peaks for the ceramic arrays in the visible range almost correspond to the band structures calculated by a plane-wave method.