Y.Ishihara,J.Yamamoto,M.Kurineto,T.Takano,T.Honda and H.Kawanishi: "Dependence of Crystal Quality on Residual Strain in Strain-Controlled Thin AlN Layer Grown by Metalorganic Vapor Phase Epitaxy"Japanese Journal of Applied Physics. 38・11. L1296-L1298 (199
Y.Ishihara,J.Yamamoto,M.Kurineto,T.Takano,T.Honda and H.Kawanishi: "Dependence of Crystal Quality on Residual Strain in Strain-Controlled Thin AlN Layer Grown by Metalorganic Vapor Phase Epitaxy"Japanese Journal of Applied Physics. 38・11. L1296-L1298 (199
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Y. Ishihara、J. Yamamoto、M. Kurineto、T. Takano、T. Honda 和 H. Kawanishi:“通过金属有机气相外延生长的应变控制薄 AlN 层中晶体质量对残余应变的依赖性”日本应用杂志物理 38・11。L1296-L1298(199)
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