Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool
Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool
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DOI：
10.1016/j.measurement.2015.11.040
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发表时间：
2016-12
期刊：
影响因子：
5.6
通讯作者：
Y. Shimizu;S. Jang;W. Gao
中科院分区：
文献类型：
--
作者：
Y. Shimizu;S. Jang;W. Gao
本文介绍了一种用于金刚石车削加工中金刚石刀具多维测量的新型光学测量仪。该测量仪器由用于刀具边缘轮廓测量的微光探头组件和用于刀具面测量的林尼克显微镜组件组成。在微光探头组件中，聚焦激光束沿刀具边缘扫描，测量刀具边缘轮廓与激光束扫描路径的偏差。为了进一步精确测量刀具边缘轮廓，需要对其光斑直径进行优化。林尼克显微镜组件是一种干涉显微镜，在其光学装置中有一对匹配的物镜，因此，将其集成到测量仪器中，不仅可以测量工具面，还可以优化聚焦激光束在微光探头组件中的光斑直径。设计了所提出的光学测量仪的光学结构，并基于光学笼系统开发了由微光探头组件和林尼克显微镜组件组成的样机。此外，还进行了一些基础实验来验证所开发样机的可行性。
This paper presents a new optical measuring instrument for multi-dimensional measurement of a diamond cutting tool to be used in diamond turning process. The measuring instrument is composed of a micro-optical probe component for tool edge contour measurement and a Linnik microscope component for tool faces measurement. In the micro-optical probe component, a focused laser beam scans along a tool edge to measure the deviation of the tool edge contour from the scanning path of the laser beam. For further precise tool edge contour measurement with the micro-optical probe component, its spot diameter needs to be optimized. The Linnik microscope component, which is an interferometric microscope having a pair of matched objective lenses in its optical setup, is therefore integrated into the measuring instrument not only to measure tool faces but also to optimize the spot diameter of the focused laser beam in the micro-optical probe component. The optical configuration of the proposed optical measuring instrument is designed, and its prototype composed of the micro-optical probe component and the Linnik microscope component is developed based on an optical cage system. Furthermore, some basic experiments are carried out to verify the feasibility of the developed prototype.