Comparative Analysis of Dry-EDM and Conventional EDM for the Manufacturing of Micro Holes in Si3N4-TiN
Comparative Analysis of Dry-EDM and Conventional EDM for the Manufacturing of Micro Holes in Si3N4-TiN
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Si3N4-TiN 微孔加工的干式电火花加工与传统电火花加工对比分析
DOI：
10.1016/j.procir.2016.02.214
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Schweitzer
中科院分区：
文献类型：
--
作者：
Uhlmann;Schimmelpfennig;Perfilov;Streckenbach;Schweitzer
在微细加工技术领域，电火花加工尤其是导电陶瓷材料的加工越来越受到重视。由于其热工作原理，电火花加工特别适合，因为它允许几乎无力加工，而不依赖于材料的机械性能[1]。高深宽比和直径为D≤0.3 mm的精密微孔使制造商采用了更复杂的工艺，从而减少了工作间隙中的冲洗，从而降低了工艺的稳定性。干式电火花加工技术可以提高气体介质的冲刷量，是一种可供选择的解决方案。对比分析了在Si3N4-TiN陶瓷上用两种不同的气体(氧气和氩气)和常规电火花加工(去离子水)进行干式电火花加工微孔的方法。结果表明，不同工艺的轴向位移y、电压u0和电流iL不同。结果表明，与常规电火花加工相比，干式电火花加工具有更高的有效脉冲频率和更短的相对运动[2]。放电流量和相对运动的差异与介质流体的性质有关。例如，去离子水作为介质的粘度ηWa=89·10-5PA·S高于氧气ηO2=2，1·10-5PA·S和ArηAr=2，3·10-5PA·S，因此，在相同的冲洗压力p=80bar的情况下，可以获得更高的流速，从而在干式电火花加工中更快地去除颗粒。此外，去离子水的击穿电阻ED_Wa=650kV/cm高于氧气ED_O2=29kV/cm和Ar_Ar=6.5kV/cm。较好的冲洗条件可以提高氧气的有效脉冲频率FEe，降低电极的相对磨损ϑ。
The importance of Electrical Discharge Machining (EDM) process is increasing, especially for the machining of electric conductive ceramic materials within the field of micro production technology. Due to its thermal working principle, EDM is particularly suitable because it allows almost force free machining independent of the material's mechanical properties [1]. High aspect ratios and precise micro holes with diameters D ≤ 0.3 mm leads manufactures to more complex processes, which reduce the flushing in the working gap and therefore the stability of the process. Enabling the increase of flushing by gaseous dielectrics, dry-EDM technology represents an alternative solution.This paper presents a comparative analysis of dry-EDM with two different gases as dielectric (oxygen and argon) and conventional EDM (deionized water) to manufacture micro holes in Si3N4-TiN ceramic. The results show that the axis displacement y, voltage u0, and current iLdiffer for the processes. It can be observed that dry-EDM has higher effective pulse frequency feand shorter relative motions between workpiece and tool electrode than the conventional EDM process [2].The differences observed in the discharge flow and relative motions between workpiece and tool electrode are related to the dielectric fluid properties. As for example, deionized water as a dielectric has a higher viscosity ηwa= 89·10-5Pa·s than oxygen ηo2= 2,1·10-5Pa·s and argon ηar= 2,3·10-5Pa·s. Thus, with the same flushing pressure of p = 80 bar it is possible to achieve higher flow speed for faster removal of particles in dry-EDM. Furthermore, deionized water has a higher breakdown resistance ED_wa= 650 kV/cm than oxygen ED_o2= 29 kV/cm and argon ED_ar= 6,5 kV/cm. The better flushing condition enables the increase of the effective pulse frequency fefor oxygen and a decrease of the electrode relative wear ϑ.
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影响因子：
6.3
作者：
Zhanbo Yu;Takahashi Jun;Kunieda Masanori
通讯作者：
Zhanbo Yu;Takahashi Jun;Kunieda Masanori
DOI：
--
发表时间：
2010
期刊：
影响因子：
--
作者：
G. Skrabalak;J. Kozak
通讯作者：
J. Kozak
DOI：
--
发表时间：
2005
期刊：
影响因子：
--
作者：
W. Schön
通讯作者：
W. Schön
线性轨道炮数字电流脉冲发生器振铃效应分析
DOI：
--
发表时间：
2002
期刊：
Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)
影响因子：
--
作者：
J. Kuo;Z. Chang;Jiann;Y. Chio;Ping
通讯作者：
Ping