Tunable light grating integrated with high-voltage driver IC for image projection display
Tunable light grating integrated with high-voltage driver IC for image projection display
复制标题
集成高压驱动IC的可调谐光栅用于图像投影显示
DOI：
10.1109/memsys.2007.4433037
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
K. Itaya
中科院分区：
文献类型：
--
作者：
K. Takahashi;H. Fujita;H. Toshiyoshi;K. Suzuki;H. Funaki;K. Itaya
本文提出了一种用于图像投影显示设备的MEMS光栅光阀与高压(40V)驱动电路的单片集成技术。采用DMO S(双扩散金属氧化物半导体)工艺在8微米厚的SOI(绝缘体上硅)晶片上制作了驱动电路，然后利用深反应离子刻蚀(DRIE)技术将MEMS光栅集成到同一SOI层中。在我们的工作中，通过静电驱动改变MEMS光栅像素的周期来调制光学光角。在驱动电压为0V和40V时，分别获得了6.6°(关态)和3.3°(通态)的光学衍射角。
This paper presents a monolithic integration technique of MEMS grating light valves with high-voltage (40 V) driver circuits that target for image projection display devices. Driver circuits were prepared on an 8-mum-thick SOI (Silicon-on- Insulator) wafer by the DMO S (Double-diffused Metal Oxide Semiconductor) processes, after which the MEMS grating were integrated in the identical SOI layer by post-processing using the DRIE (Deep Reactive Ion Etching). In our work, optical light angle is modulated by changing the period of the MEMS grating pixel by means of electrostatic actuation. Optical diffraction angles of 6.6deg (OFF-state) and 3.3 deg (ON-State) were obtained with drive voltage of 0 V and 40 V, respectively.