A new specimen preparation method for cross-section TEM using diamond powders
A new specimen preparation method for cross-section TEM using diamond powders
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使用金刚石粉末制备横截面 TEM 样品的新方法
DOI：
10.1093/oxfordjournals.jmicro.a023659
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
M. Shiojiri
中科院分区：
文献类型：
--
作者：
M. Kawasaki;T. Yoshioka;M. Shiojiri
发展了一种新的离子研磨样品制备方法，用于横截面的透射电子显微镜(TEM)观察，它可以快速制备薄化质量与传统离子研磨方法相当的样品。这种方法省去了可能对制备样品的最终质量有很大影响的机械预稀释过程。在离子球磨制备样品的整个过程中，机械预稀化过程是最耗时的，而且可能会导致样品损坏。新开发的离子挖掘法制备方法使用的是离子研磨速度较慢的金刚石粉末。将粉末分散在切片材料的表面上。在垂直的Ar+离子轰击下，金刚石粉末表面暴露出来。由于金刚石和材料内部元素之间的刻蚀速率不同，通过垂直于样品中金刚石分散表面的离子束照射，没有金刚石粉末的区域的刻蚀速度比有金刚石粉末的区域快。因此，离子挖掘在几分钟内就形成了许多柱子。这些柱子要用横截面透射电子显微镜进行检查。这种方法保证在较短的时间内完成横截面样品的制备，这在半导体和电磁材料研究等需要通过横截面观察大量样品的领域中是可以理解的。
A new ion-milling specimen preparation method for the cross-sectional transmission electron microscope (TEM) observation has been developed, which enables fast preparation with thinning quality comparable to a conventional ion-milling method. This method eliminates a mechanical prethinning process which may influence deeply to the final quality of the prepared specimen. The mechanical pre-thinning process is the most time-consuming in the whole process of the specimen preparation with ion milling and may introduce a specimen damage. The new developed preparation method named the ion-digging method uses diamond powder which has a slower ion-milling rate. Powders are dispersed on a surface of the sliced material. The surface with diamond powders is exposed under perpendicular Ar+ion bombardment. Due to the nature of different etching rates between diamond and the elements inside the material, the area without diamond powder is etched faster than that with diamond powder by irradiating ion beam perpendicular to the diamond-dispersed surface of the specimen. Consequently a number of pillars are formed by the ion digging within a few minutes. Those pillars are to be examined by cross-section TEM. This method promises cross-section specimen preparation to be completed in a shorter time, which may be appreciated in the fields where a number of specimen are to be examined through cross-sectional view, such as semiconductors and elecro-magnetic materials research.