Deposition Rate Effect on Optical and Electrical Properties of Thermally Evaporated WO3-x/Ag/WO3-x Multilayer Electrode for Transparent and Flexible Thin Film Heaters
Deposition Rate Effect on Optical and Electrical Properties of Thermally Evaporated WO3-x/Ag/WO3-x Multilayer Electrode for Transparent and Flexible Thin Film Heaters
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DOI：
10.1038/s41598-020-65260-1
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发表时间：
2020-05-20
影响因子：
4.6
通讯作者：
Kim, Han-Ki
中科院分区：
文献类型：
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作者：
Lim, Sang-Hwi;Kim, Han-Ki
研究了沉积速率对热蒸发WO3-x/Ag/WO3-x （WAW）多层电极光学、电学和形貌特性的影响。通过控制WO3-x和Ag层的沉积速率，可以控制WO3-x和Ag之间的界面结构，提高热蒸发WAW多层电极的光学和电学性能。在WO3-x（2.5埃/秒）和Ag（10埃/秒）的最佳沉积速率下，对称WAW多层膜在550nm波长处具有92.16%的高透光率和3.78 ω /平方的低片阻。在反复弯曲、滚动和扭转过程中，电阻无变化，表明WAW多层电极具有优越的柔韧性。作为WAW多层电极的一个很有前途的应用，我们提出了透明柔性薄膜加热器（TFHs）来替代高成本的氧化铟锡基TFHs。与基于ito的TFHs相比，基于WAW的TFHs具有更高的对流换热性能，并且由于片状电阻更低，在较低的输入电压下可以获得较高的饱和温度。这表明WAW多层材料适合作为高性能透明柔性TFHs的电极。
We investigated the deposition rate effect on the optical, electrical, and morphological characteristics of thermally evaporated WO3-x/Ag/WO3-x (WAW) multilayer electrodes. By controlling the deposition rate of the WO3-x and Ag layers, we can control the interface structure between WO3-x and Ag and improve both the optical and electrical properties of the thermally evaporated WAW multilayer electrodes. At the optimized deposition rate of WO3-x (2.5 angstrom /sec) and Ag (10 angstrom /sec), the symmetric WAW multilayer exhibited a high optical transmittance of 92.16% at a 550nm wavelength and low sheet resistance of 3.78 Omega /square. During repeated bending, rolling, and twisting, there was no resistance change indicating the superior flexibility of WAW multilayer electrodes. As a promising application of the WAW multilayer electrodes, we suggested the transparent and flexible thin film heaters (TFHs) to substitute the high cost indium tin oxide-based TFHs. In comparison to the ITO-based TFHs, the WAW based TFHs showed higher convective heat transfer property and higher saturation temperatures are achieved at lower input voltages due to lower sheet resistance. This indicates that the WAW multilayer is suitable as the electrode for high performance transparent and flexible TFHs.