An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film
An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film
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DOI：
10.1364/oe.18.011859
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发表时间：
2010-05-24
期刊：
影响因子：
3.8
通讯作者：
Baets, Roel
中科院分区：
文献类型：
--
作者：
Yebo, Nebiyu A.;Lommens, Petra;Baets, Roel
在绝缘体上硅技术上制造的光学结构为实现高度紧凑、通用和低成本的器件提供了方便的平台。在这项工作中，我们证明了这种技术的集成低功耗和低成本的光学气体传感的承诺。采用ZnO纳米粒子薄膜作为SOI微环谐振器的涂层，制作了一个半径为5 μ m的室温乙醇蒸气传感器。环形谐振器上的局部涂层由直径约3 nm的ZnO纳米颗粒的胶体悬浮液制备。涂层的多孔性质为气体吸附提供了大的表面积。ZnO的折射率变化后，蒸汽吸附移动通过倏逝场相互作用的微共振。乙醇蒸汽浓度低至100 ppm的检测与此传感配置和检测限低于25 ppm的估计。(C)2009年美国光学学会
Optical structures fabricated on silicon-on-insulator technology provide a convenient platform for the implementation of highly compact, versatile and low cost devices. In this work, we demonstrate the promise of this technology for integrated low power and low cost optical gas sensing. A room temperature ethanol vapor sensor is demonstrated using a ZnO nanoparticle film as a coating on an SOI micro-ring resonator of 5 mu m in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of around 3 nm diameter. The porous nature of the coating provides a large surface area for gas adsorption. The ZnO refractive index change upon vapor adsorption shifts the microring resonance through evanescent field interaction. Ethanol vapor concentrations down to 100 ppm are detected with this sensing configuration and a detection limit below 25 ppm is estimated. (C) 2009 Optical Society of America