High-resolution angular and displacement sensing based on the excitation of surface plasma waves.
High-resolution angular and displacement sensing based on the excitation of surface plasma waves.
复制标题
基于表面等离子体波激励的高分辨率角度和位移传感。
DOI：
10.1364/ao.36.004521
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发表时间：
1997
期刊：
影响因子：
1.9
通讯作者：
F. Quercioli
中科院分区：
文献类型：
--
作者：
G. Margheri;A. Mannoni;F. Quercioli
从数值和实验两方面探讨了利用衰减全反射（ATR）现象构建角度和位移传感器的可能性。ATR发生在表面波被入射的TM电磁波通过谐振相位匹配过程激发时，如在Kretschmann耦合方案中。反射强度强烈地依赖于光束的入射角。我们首先显示了一些计算的灵敏度和线性的ATR为基础的传感器，然后进行实验，说明如何可以获得适度的努力的顺序为0.1弧秒的角分辨率。最后，我们展示了如何传感器，结合一个简单的光学安排，可以用来检测和测量纳米位移，如压电致动器提供的。
The possibility of building angular and displacement sensors based on the phenomenon of attenuated total reflection (ATR) is explored both numerically and experimentally. ATR occurs when a surface wave is excited by an incoming TM electromagnetic wave through a resonant phase-matching process, as in the Kretschmann coupling scheme. The reflected intensity strongly depends on the angle of incidence of the beam. We first show some computations of the sensitivity and the linearity of an ATR-based sensor, then proceed to the experiment, illustrating how an angular resolution of the order of 0.1 arc sec can be obtained with moderate effort. Finally we show how the sensor, combined with a simple optical arrangement, can be used to detect and measure nanometric displacements, as those provided by piezoelectric actuators.