Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA
Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA
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DOI：
10.1007/s10909-015-1381-z
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发表时间：
2016-07-01
影响因子：
2
通讯作者：
Zuiddam, M. R.
中科院分区：
文献类型：
--
作者：
Ridder, M. L.;Khosropanah, P.;Zuiddam, M. R.
研制出噪声等效功率低于2 10 W/Hz的超低噪声过渡边缘传感器（TES），满足空间红外天文望远镜远红外SAFARI仪器的灵敏度要求。我们的TES探测器基于氮化硅（SiN）岛上的钛/金（Ti/Au）热敏电阻。在沐浴温度下，这个岛与硅支撑结构的硅腿热连接在一起。SiN腿非常细（250纳米），窄（500纳米）和长（300米以上）；为了达到所需的灵敏度水平，腿隔离式测辐射热计需要这些尺寸。在本文中，我们描述了最新的制造工艺，我们的TES热辐射计提高了灵敏度。
Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 10 W/Hz have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.